Since the 1990s, study of MEMS inertial device became more and more popular.MEMS inertial sensors began to get a wide range of business applications . In this paper, some recent research results at home and abroad are classified and summarized, respectively for MEMS acceleration sensor, MEMS gyroscope ,MIMU(Micro Inertial Messurement Unit)and inertial microsystem of literature review and analysis, and get the conclusion of MEMS inertial sensor development trend, the future development of MEMS inertial device mainly has four directions: high precision, to adapt to the application requirements of higher precision and intelligent technology;Miniaturization for portable equipment installation; High integration to achieve multiple functional integration;High adaptability, to adapt to complex environment, to broaden the scope of application.